High Throughput Zero Mode Waveguides via Natural Lithography
Shawn H. Pfeil, Yale E. Goldman
Zero Mode Waveguides (ZMWs), sub-wavelength wells in a metallic substrate, can be used to create nanoscale detection volumes which allow fluorescently labeled molecules in micromolar concentrations to be interrogated one at a time1,2. Traditionally ZMWs have been fabricated with e-beam lithography leading to high cost and low-throughput. We are developing a high-throughput, low-cost fabrication procedure based on Natural Lithography3.
1) Levene et al. Science 2003
2) Miyake et al. Analytical Chemistry 2008
3) Haginoya et al. Applied Physics Letters 1997